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1. Identificação
Tipo de ReferênciaArtigo em Evento (Conference Proceedings)
Sitemtc-m16c.sid.inpe.br
Código do Detentorisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identificador8JMKD3MGP8W/364TSRB
Repositóriosid.inpe.br/mtc-m18@80/2009/09.22.13.00
Repositório de Metadadossid.inpe.br/mtc-m18@80/2009/09.22.13.00.21
Última Atualização dos Metadados2020:04.28.17.49.06 (UTC) administrator
Chave SecundáriaINPE--PRE/
Chave de CitaçãoSilvaJúniorUedaMach:2009:InOxNi
TítuloInfluence of Oxygen in Nitrogen PBII for Stainless Steel and Aluminum Alloy
Ano2009
Data de Acesso21 maio 2024
Tipo SecundárioPRE CI
2. Contextualização
Autor1 Silva Júnior, Arlindo Moraes
2 Ueda, Mário
3 Machia, M.
Grupo1 LAS-CTE-INPE-MCT-BR
2 LAP-CTE-INPE-MCT-BR
Afiliação1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 UNICAMP
Nome do EventoInternational Workshop on Plasma-Based Ion Implantation and Deposition, 10 (PPI&D).
Localização do EventoSão José dos Campos, SP
Data7-11 Sept.
Tipo TerciárioPoster
Histórico (UTC)2009-09-22 13:00:22 :: simone -> administrator ::
2020-04-28 17:49:06 :: administrator -> simone :: 2009
3. Conteúdo e estrutura
É a matriz ou uma cópia?é a matriz
Estágio do Conteúdoconcluido
Transferível1
Tipo do ConteúdoExternal Contribution
ResumoThe difficulty in performing ion implantation of nitrogen in some types of materials led to investigate the contaminant elements present in the vacuum chamber of PBII system, in particular oxygen. We used a mass spectrometer (RGA) of a quadrupole filter type, which enables the analysis of residual gases in the chamber by the measurement of mass / charge ratio of the atoms or molecules. We found a large proportion of oxygen combined with hydrogen (H2O) in the case of a vacuum with base pressure of 1x10-5 mbar. Since the oxygen is strongly present in all of our PBII results, we tried to minimize its presence. In the case of aluminum, the oxide formation prevents the implantation of nitrogen while in stainless steel that has a small influence. In one of the experiments, comparative PBII treatments were carried out for those two types of metals. In one case, the relationship between r = H2O/N was approximately 30% at a working pressure of 7.5 x10-3 mbar. Improvement of the gas injection system and wall cleaning with plasma glow discharge of Argon, in other case, made it possible to reduce the r ratio to 5%, i.e. 80% reduction of oxygen in the chamber. We carried out PBII in samples of Al7075 and SS304 in a total pressure of 2x10-2 mbar, with high voltage pulses of 3 kV, frequency of 1 kHz, and pulse length of 5ìs. Plasma source was operated at 300V and 0.6 A. Analysis with X-ray diffraction showed strong presence of nitrogen in the as-implanted samples of Al7075 and SS304, for the case of the last treatment. Currently, we are analyzing the resistance to corrosion and other properties of the implanted samples. Results of x-ray diffraction showed great surface improvements and importance of PBII run in environments with low oxygen content in both cases.
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4. Condições de acesso e uso
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Visibilidadeshown
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5. Fontes relacionadas
Repositório Espelhosid.inpe.br/mtc-m18@80/2008/03.17.15.17.24
Unidades Imediatamente Superiores8JMKD3MGPCW/3ESR3H2
8JMKD3MGPCW/3ET2RFS
Acervo Hospedeirosid.inpe.br/mtc-m18@80/2008/03.17.15.17
6. Notas
Campos Vaziosarchivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory descriptionlevel dissemination documentstage doi e-mailaddress edition editor electronicmailaddress format isbn issn keywords label language lineage mark nextedition notes numberoffiles numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readergroup resumeid rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark type url versiontype volume
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